TY  - BOOK
AU  - Jaeger, Richard C.
TI  - Introduction to microelectronic fabrication
SN  - 0-201-14695-9
AV  - TK7874.J33 
CY  - New York
KW  -  Integrated circuits--Design and construction
KW  -  Linear integrated circuits
KW  - Electrical engineering
KW  - Integrated circuits--Very large scale integration--Computer--aided design
ER  -