Jaeger, Richard C. <br/><br/>
Introduction to microelectronic fabrication 

 - New York   Addison-Wesley    1988 
 - xiii, 232 p. 
<br/><br/><label>ISBN: </label>0-201-14695-9 
<br/><br/><label>Subjects--Topical Terms: </label><br/> Integrated circuits--Design and construction<br/> Linear integrated circuits<br/>Electrical engineering<br/>Integrated circuits--Very large scale integration--Computer--aided design
<br/><br/><label>LC Class. No.: </label>TK7874.J33